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| * | 2006 | |
|---|---|---|
| 1 | EE | Xiqiu Fan, Honghai Zhang, Sheng Liu, Xiaofeng Hu, Ke Jia: NIL - a low-cost and high-throughput MEMS fabrication method compatible with IC manufacturing technology. Microelectronics Journal 37(2): 121-126 (2006) |
| 1 | Xiaofeng Hu | [1] |
| 2 | Ke Jia | [1] |
| 3 | Sheng Liu | [1] |
| 4 | Honghai Zhang | [1] |